Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: F. Marschall, J. Vila-Comamala, V.A. Guzenko, C. David
Journal title: Microelectronic Engineering
Journal number: 177
Journal publisher: Elsevier BV
Published year: 2017
Published pages: 25-29
DOI identifier: 10.1016/j.mee.2017.01.017
ISSN: 0167-9317