Systematic efficiency study of line-doubled zone plates

Summary

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Authors: F. Marschall, J. Vila-Comamala, V.A. Guzenko, C. David

Journal title: Microelectronic Engineering

Journal number: 177

Journal publisher: Elsevier BV

Published year: 2017

Published pages: 25-29

DOI identifier: 10.1016/j.mee.2017.01.017

ISSN: 0167-9317