Scalable High-Precision Trimming of Photonic Resonances by Polymer Exposure to Energetic Beams

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Authors: N. Farmakidis; H. Yu; J. S. Lee; J. Feldmann; M. Wang; Y. He; S. Aggarwal; B. Dong; W. H. P. Pernice; H. Bhaskaran

Journal title: Nano Letters

Journal number: 23(11)

Journal publisher: ACS

Published year: 2023

Published pages: 4800-4806

DOI identifier: 10.1021/acs.nanolett.3c00220

ISSN: 1530-6992