Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching

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Authors: E. Lomonte, M. Stappers, L. Krämer, W. H.P. Pernice, F. Lenzini

Journal title: Scientific Reports

Journal number: 14(1)

Journal publisher: Nature Publishing Group

Published year: 2024

DOI identifier: 10.1038/s41598-024-53975-4

ISSN: 2045-2322