High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

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Authors: B. Lopez-Rodriguez, R. van der Kolk, S. Aggarwal, N. Sharma, Z. Li, D. van der Plaats, T. Scholte, J. Chang, S. Gröblacher, S. F. Pereira, H. Bhaskaran, I. E. Zadeh

Journal title: ACS Photonics

Journal number: 10(10)

Journal publisher: American Chemical Society

Published year: 2023

DOI identifier: 10.1021/acsphotonics.3c00968

ISSN: 1520-5126