Summary
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Authors: Iman Dadras, Sofiane Ghenna, Sebastien Grondel, Eric Cattan, Jaan Raik, Alvo Aabloo, Saoni Banerji
Journal title: Journal of Microelectromechanical Systems
Journal publisher: Institute of Electrical and Electronics Engineers
Published year: 2021
Published pages: 1-10
DOI identifier: 10.1109/jmems.2021.3060897
ISSN: 1057-7157