Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching

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Authors: Diana Mata-Hernandez, Daniel Fernández, Saoni Banerji, Jordi Madrenas

Journal title: Sensors

Journal number: 20/21

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 6037

DOI identifier: 10.3390/s20216037

ISSN: 1424-8220