Scalable Non‐Volatile Tuning of Photonic Computational Memories by Automated Silicon Ion Implantation

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Authors: Akhil Varri, Shabnam Taheriniya, Frank Brückerhoff‐Plückelmann, Ivonne Bente, Nikolaos Farmakidis, Daniel Bernhardt, Harald Rösner, Maximilian Kruth, Achim Nadzeyka, Torsten Richter, Christopher David Wright, Harish Bhaskaran, Gerhard Wilde, Wolfram H. P. Pernice

Journal title: Advanced Materials

Journal number: 36

Journal publisher: Wiley

Published year: 2024

DOI identifier: 10.1002/adma.202310596

ISSN: 0935-9648