Scalable High-Precision Trimming of Photonic Resonances by Polymer Exposure to Energetic Beams

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Authors: Nikolaos Farmakidis, Hao Yu, June Sang Lee, Johannes Feldmann, Mengyun Wang, Yuhan He, Samarth Aggarwal, Bowei Dong, Wolfram H. P. Pernice, Harish Bhaskaran

Journal title: Nano Letters

Journal number: 23

Journal publisher: American Chemical Society (ACS)

Published year: 2023

DOI identifier: 10.1021/acs.nanolett.3c00220

ISSN: 1530-6984