Phase formation and electrical properties of reactively sputtered Fe_1−xO thin films

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Authors: S Evertz, N Nicolin, N Cheng, D Primetzhofer, J P Best, G Dehm

Journal title: Journal of Physics D: Applied Physics

Journal number: 57

Journal publisher: Institute of Physics Publishing

Published year: 2023

Published pages: 065302

DOI identifier: 10.1088/1361-6463/ad0a3e

ISSN: 0022-3727