Influence of substrates and e-beam evaporation parameters on the microstructure of nanocrystalline and epitaxially grown Ti thin films

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Authors: Vivek Devulapalli, Hanna Bishara, Matteo Ghidelli, Gerhard Dehm, C.H. Liebscher

Journal title: Applied Surface Science

Journal number: 562

Journal publisher: Elsevier BV

Published year: 2023

Published pages: 150194

DOI identifier: 10.1016/j.apsusc.2021.150194

ISSN: 0169-4332