Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy

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Authors: Richard Ciesielski, Janusz Bogdanowicz, Roger Loo, Yosuke Shimura, Antonio Mani, Christoph Mitterbauer, Michael Kolbe, Victor Soltwisch

Journal title: Journal of Micro/Nanopatterning, Materials, and Metrology

Journal number: 23

Journal publisher: SPIE-Intl Soc Optical Eng

Published year: 2024

DOI identifier: 10.1117/1.JMM.23.4.041405

ISSN: 2708-8340