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Authors: Manuel Belanche, Yoshiyuki Yonezawa, René Heller, Arnold Müller, Christof Vockenhuber, Corinna Martinella, Michael Rüb, Masashi Kato, Koichi Murata, Hidekazu Tsuchida, Koji Nakayama, Ulrike Grossner
Journal title: Materials Science in Semiconductor Processing
Journal number: 179
Journal publisher: Pergamon Press
Published year: 2024
Published pages: 108461
DOI identifier: 10.1016/j.mssp.2024.108461
ISSN: 1369-8001
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