Sensitivity of D<sub>it</sub> Extraction at the SiO<sub>2</sub>/SiC Interface Using Quasi-Static Capacitance-Voltage Measurements

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Authors: Belanche, M., Kumar, P., Woerle, J., Stark, R., Grossner, U.

Journal title: Silicon Carbide and Related Materials 2021

Journal publisher: Trans Tech Publications

Published year: 2022