Complementary two dimensional carrier profiles of 4H-SiC MOSFETs by Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

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Authors: Patrick Fiorenza, Marco Zignale, Edoardo. Zanetti, Mario S. Alessandrino, Beatrice Carbone, Alfio Guarnera, Mario Saggio, Filippo Giannazzo, Fabrizio Roccaforte

Journal publisher: Solid State Phenomena

Published year: 2024

DOI identifier: 10.48550/arXiv.2407.13370