Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors

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Authors: W. Hamouda, C. Lubin, S. Ueda, Y. Yamashita, O. Renault, F. Mehmood, T. Mikolajick, U. Schroeder, R. Negrea, N. Barrett

Journal title: Applied Physics Letters

Journal number: 116/25

Journal publisher: American Institute of Physics

Published year: 2020

Published pages: 252903

DOI identifier: 10.1063/5.0012595

ISSN: 0003-6951