Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

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Authors: Jordan Bouaziz, Pedro Rojo Romeo, Nicolas Baboux, Raluca Negrea, Lucian Pintilie, Bertrand Vilquin

Journal title: APL Materials

Journal number: 7/8

Journal publisher: APL Materials

Published year: 2019

Published pages: 081109

DOI identifier: 10.1063/1.5110894

ISSN: 2166-532X