Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

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Authors: Jordan Bouaziz, Pedro Rojo Romeo, Nicolas Baboux, Bertrand Vilquin

Journal title: Journal of Vacuum Science & Technology B

Journal number: 37/2

Journal publisher: AVS Science and Technology Society

Published year: 2019

Published pages: 021203

DOI identifier: 10.1116/1.5060643

ISSN: 2166-2754