Physical chemistry of the TiN/Hf 0.5 Zr 0.5 O 2 interface

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Authors: W. Hamouda, A. Pancotti, C. Lubin, L. Tortech, C. Richter, T. Mikolajick, U. Schroeder, N. Barrett

Journal title: Journal of Applied Physics

Journal number: 127/6

Journal publisher: American Institute of Physics

Published year: 2020

Published pages: 064105

DOI identifier: 10.1063/1.5128502

ISSN: 0021-8979