The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

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Authors: Victor Deinhart, Lisa-Marie Kern, Jan N Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I Bolotin, Stephanie Reich, Katja Höflich

Journal title: Beilstein Journal of Nanotechnology

Journal number: 12

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2021

Published pages: 304-318

DOI identifier: 10.3762/bjnano.12.25

ISSN: 2190-4286