Monolithically Integrated SiON Photonic Circuit and Silicon Single-Photon Detectors for NIR-Range Operation

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Authors: Fabio Acerbi, Martino Bernard, Bernhard Goll, Alberto Gola, Horst Zimmermann, Georg Pucker, Mher Ghulinyan

Journal title: Journal of Lightwave Technology

Journal number: 42

Journal publisher: Optical Society of America

Published year: 2024

Published pages: 2831-2841

DOI identifier: 10.1109/jlt.2023.3342031

ISSN: 0733-8724