Activation of telecom emitters in silicon upon ion implantation and ns pulsed laser annealing

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Authors: Greta Andrini, Gabriele Zanelli, Sviatoslav Ditalia Tchernij, Emilio Corte, Elena Nieto Hernández, Alessio Verna, Matteo Cocuzza, Ettore Bernardi, Salvatore Virzì, Paolo Traina, Ivo P. Degiovanni, Marco Genovese, Paolo Olivero, Jacopo Forneris

Journal title: Communications Materials

Journal number: 5

Journal publisher: SPRINGER NATURE

Published year: 2024

DOI identifier: 10.1038/s43246-024-00486-4

ISSN: 2662-4443