Tracking the creation of single photon emitters in AlN by implantation and annealing

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Authors: H.B. Yağcı, E. Nieto Hernández, J.K. Cannon, S.G. Bishop, E. Corte, J.P. Hadden, P. Olivero, J. Forneris, A.J. Bennett

Journal title: Optical Materials

Journal number: 156

Journal publisher: Elsevier BV

Published year: 2024

Published pages: 115967

DOI identifier: 10.1016/j.optmat.2024.115967

ISSN: 0925-3467