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Authors: B. Petrović, A. Bader, J. Nauschütz, T. Sato, S. Birner, R. Weih, F. Hartmann, S. Höfling
Journal title: Journal of Vacuum Science & Technology B
Journal number: 42
Journal publisher: AVS Science and Technology Society
Published year: 2024
DOI identifier: 10.1116/6.0003584
ISSN: 2166-2754