Results of IDMD and kMC simulations of FEBID processes with fully validated sets of parameters

Refining the parameters of the IDMD and kMC models using the feedback from the validation studies in T2.1-2.4. Benchmarking of the atomistic level IDMD and kMC simulations of the FEBID processes with fully validated sets of parameters, accounting for thermal effects, charge transfer effects, and for irradiation effects due to SEs and BSEs. Demonstration of the capacities of the developed tools to the EU research community and broad industrial communities in the field of irradiation-induced nanofabrication