Crystallinity and composition of Sc1−x(−y)Six(Py) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications

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Authors: Bert Pollefliet, Clement Porret, Jean-Luc Everaert, Kiroubanand Sankaran, Xiaoyu Piao, Erik Rosseel, Thierry Conard, Andrea Impagnatiello, Yosuke Shimura, Naoto Horiguchi, Roger Loo, André Vantomme and Clement Merckling

Journal title: JAPANESE JOURNAL OF APPLIED PHYSICS

Journal number: 63

Journal publisher: The Japan Society of Applied Physics

Published year: 2024

Published pages: 02SP97

DOI identifier: 10.35848/1347-4065/ad1f0d

ISSN: 0021-4922