Nanomechanical Crystalline AlN Resonators with High Quality Factors for Quantum Optoelectromechanics

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Authors: Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, André Strittmatter, Witlef Wieczorek

Journal title: Advanced Materials

Journal number: 36

Journal publisher: Wiley

Published year: 2024

DOI identifier: 10.1002/ADMA.202403155

ISSN: 0935-9648