Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride

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Authors: Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, Jürgen Bläsing, André Strittmatter, Witlef Wieczorek

Journal title: Materials for Quantum Technology

Journal number: 4

Journal publisher: IOP Publishing

Published year: 2024

DOI identifier: 10.1088/2633-4356/AD9B64

ISSN: 2633-4356