High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

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Authors: Bruno Lopez-Rodriguez, Roald van der Kolk, Samarth Aggarwal, Naresh Sharma, Zizheng Li, Daniel van der Plaats, Thomas Scholte, Jin Chang, Simon Gröblacher, Silvania F. Pereira, Harish Bhaskaran, Iman Esmaeil Zadeh

Journal title: ACS Photonic

Journal publisher: American Chemical Society

Published year: 2023

DOI identifier: 10.48550/arXiv.2306.04491

ISSN: 2330-4022