Fabrication and characterization of a 2D PZT MEMS resonant scanner

Summary

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Authors: Parviz Zolfaghari, Mehrdad Khodapanahandeh, Hakan Urey

Journal title: Journal of Micromechanics and Microengineering

Journal number: 35

Journal publisher: IOP Publishing

Published year: 2025

DOI identifier: 10.1088/1361-6439/ADFAE2

ISSN: 0960-1317