Study of laser-based transfer of graphene via laser induced transfer process for the on-chip integration of photodetector

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Authors: Marina Makrygianni, Kostas Andritsos, Alba Centeno, Amaia Zurutuza, and Ioanna Zergioti

Journal title: Proc. SPIE 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, 128720B (4)

Journal publisher: SPIE

Published year: 2024

DOI identifier: 10.1117/12.3002370

ISSN: 0277-786X