Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays

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Authors: Leonhard M. Lohr, Richard Ciesielski, Vinh-Binh Truong, Victor Soltwisch

Journal title: Nanoscale

Journal number: 17

Journal publisher: Royal Society of Chemistry (RSC)

Published year: 2025

DOI identifier: 10.1039/D4NR04580G

ISSN: 2040-3364