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Resource
HOLISTEP-1372663
Preliminary LCA and LCC model
Summary
using the first set of LCA and LCC data
More information & hyperlinks
Web resources:
https://ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e51eb73234&appId=PPGMS
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Associated projects
HOLISTEP - SUB-WAVELENGTH HOLOGRAPHIC LITHOGRAPHY STEPPER FOR INTEGRATED CIRCUIT PRODUCTION
Organisations
Not specified