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Authors: Valeriia Sedova, Florie Ogor, Joël Rovera, Odysseas Tsilipakos, Jonas Wiedenmann, Kevin Heggarty, Andreas Erdmann
Journal title: Journal of Micro/Nanopatterning, Materials, and Metrology
Journal number: 24
Journal publisher: SPIE-Intl Soc Optical Eng
Published year: 2025
DOI identifier: 10.1117/1.JMM.24.2.023001
ISSN: 2708-8340
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