Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

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Authors: Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft

Journal title: Sensors

Journal number: 23

Journal publisher: MDPI AG

Published year: 2023

DOI identifier: 10.3390/S23104826

ISSN: 1424-8220