Activation and characterization of Rb MEMS cells with an automatic system at wafer level

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: M. Gozzelino, E. Cerrato, C. Gionco, S. Micalizio, G. Aprile, M. Crivellari, F. Levi, D. Calonico

Journal title: Sensors and Actuators A: Physical

Journal number: 391

Journal publisher: Elsevier BV

Published year: 2025

DOI identifier: 10.1016/J.SNA.2025.116621

ISSN: 0924-4247