Influence of different hydrocarbons on impurities and minority carrier lifetime in 4H-SiC epitaxial layers

Summary

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Authors: Misagh Ghezellou; Erlend Lemva Ousdal; Marianne E Bathen; Lasse Vines; Jawad Ul-Hassan

Journal title: Journal of Physics: Materials

Journal publisher: ION Publishing

Published year: 2025

DOI identifier: 10.1088/2515-7639/ADB7C0

ISSN: 2515-7639