Characterization of a Multi-Channel CMUT Gas Sensor

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Authors: Charles Boutonnet, Anurupa Shaw, Jean-Claude Bastien, François Blard, Adrien Vialletelle, Vincent Pinon, Christophe Le Blanc, Cyril Herrier, Thierry Livache, Bruno Fain

Journal title: Journal of Microelectromechanical Systems

Journal number: 34

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2025

Published pages: 4-14

DOI identifier: 10.1109/jmems.2024.3495539

ISSN: 1057-7157