Liquid metal fabrication of ultrathin Ga2O3 and GaN layers for integrated optics

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Authors: Panteha Pedram, Ali Zavabeti, Nitu Syed, Amine Slassi, Chung Kim Nguyen, Benjamin Fornacciari, Anne Lamirand, Jules Galipaud, Arrigo Calzolari, Andreas Boes, Torben Daenke, Sebastien Cueff, Arnan Mitchell, Christelle Monat

Journal title: 2D Photonic Materials and Devices VI

Journal publisher: SPIE

Published year: 2023

Published pages: 35

DOI identifier: 10.1117/12.2659145