Mechanically Stable PMMA‐Based Large‐Area Nano‐Channels with Sub‐10 nm Depth

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Authors: Min Liu; Tobias Reimer; Yongkang Wang; Mathias Kläui; Yaowen Xing; Xiahui Gui; Yijun Cao; Rüdiger Berger; Hai Wang; Mischa Bonn

Journal title: Advanced Materials Technologies

Journal number: 10

Journal publisher: John Wiley & Sons

Published year: 2024

DOI identifier: 10.25358/OPENSCIENCE-11279

ISSN: 2365-709X