Estimating Temperature-Dependent Glass Substrate CTE via Frequency Measurements in a MEMS Gyroscope

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Authors: Mehran Hosseini-Pishrobat, Erdinc Tatar

Journal title: 2025 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Journal publisher: IEEE

Published year: 2025

DOI identifier: 10.1109/INERTIAL63280.2025.11037086