Exploring the Boundaries of MEMS Gyroscope Scale Factor Temperature Stability via Distributed On-Chip Strain Measurements

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Authors: Mehran Hosseini-Pishrobat, Ahmet Arif Aslan, Erdinc Tatar

Journal title: Journal of Microelectromechanical Systems

Journal publisher: Institute of Electrical and Electronics Engineers (IEEE)

Published year: 2025

DOI identifier: 10.5281/ZENODO.17724198

ISSN: 1057-7157