Achieving Below 200ppm Scale Factor Temperature Stability in an am Gyroscope with On-Chip Stress Sensing

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Authors: Mehran Hosseini-Pishrobat, Derin Erkan, Erdinc Tatar

Journal title: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)

Journal publisher: IEEE

Published year: 2025

DOI identifier: 10.1109/MEMS61431.2025.10917391