ERD

Spectral characterization of an industrial EUV light source for nanolithography

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Dependence of ion charge-energy emission from Nd:YAG-laser-produced plasma on laser intensity in the 0.4–40×10^10 W...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Mass Loss from a Stretching Semitransparent Sheet of Liquid Tin

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Periodic Reporting for period 3 - EUVPLASMA (Laser-driven plasma sources of extreme ultraviolet light for nanolithograph...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Characterization of 1- and 2 − μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultravio...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Speed of fragments ejected by an expanding liquid tin sheet

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Mass partitioning in fragmenting tin sheets

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Laser-induced vaporization of a stretching sheet of liquid tin

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

High-energy parametric oscillator and amplifier pulsed light source at 2-μm

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

EUV spectroscopy of Sn 5 + –Sn 10 + ions in an electron beam ion trap and laser-produced plasmas

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrom...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

High-energy ions from Nd:YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydro...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

EUV spectroscopy of highly charged Sn 13 + − Sn

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future ex...

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Strongly anisotropic ion emission in the expansion of Nd:YAG-laser-produced plasma

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Project: EUVPLASMA

Updated at: 27-04-2024

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Project acronym EUVPLASMA

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